Semiconductor equipment exposes metal parts to extreme conditions — vacuum, heat, corrosive gases, and plasma. Surface treatment isn't optional; it's a fundamental design consideration.
Common surface treatments
- Anodizing (aluminum) — clear, color, hard anodizing (25-50 μm) for wear and corrosion resistance.
- Nickel plating — including electroless nickel-phosphorus, providing uniform thickness over complex shapes.
- PVD / DLC coatings — TiN, CrN, AlTiN for extreme wear and low-friction applications.
- Electropolishing + passivation — standard for stainless parts in process chambers.
Selection considerations
Choose based on environment (vacuum, gases, temperature), mechanical and electrical requirements, cleanliness level (Class 100 / Class 10 packaging), and cost. The right surface treatment can extend part life 3-5×; the wrong one fails within days.
